PACVD = Plasma-Assisted Chemical Vapour Deposition
To produce metal-free carbon coatings, Oerlikon Balzers Coating uses the high-frequency PACVD process.
The setup used in this process is similar to that for sputtering. But after sputtering a metallic adhesion film, a high-frequency AC voltage is applied.
On introducing a gas containing the coating elements, a gas discharge occurs in the process chamber. Thiscreates carbon and hydrogen atoms (ions and radicals) that form a dense coating on the tools and components. Varying the applied voltage influences the coating properties.
1 Argon
2 Reactive gas
3 Components
4 Plasma sheath
5 High-frequency connection
6 Vacuum pump
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